Resonant vacuum gauge
https://doi.org/10.20915/2687-0886-2020-16-1-17-23
Abstract
This article is devoted to development and research of sensitive elements, transducers and vacuum gauges created by resonant method and intended for measuring absolute pressure in a wide range from 10 to 104 Pa.
About the Authors
V. N. Gorobey
D. I. Mendeleyev Institute for Metrology
Russian Federation
Russian Federation
Vladimir N. Gorobey – PhD (Engineering), head of laboratory
19 Moskovsky ave., St. Petersburg, 190005,
R. E. Kuvandykov
D. I. Mendeleyev Institute for Metrology
Russian Federation
Russian Federation
Rustam E. Kuvandykov – engineer
19 Moskovsky ave., St. Petersburg, 190005,
R. A. Teteruk
D. I. Mendeleyev Institute for Metrology
Russian Federation
Russian Federation
Roman A. Teteruk – PhD (Engineering), head of the research department of state standards in the field of pressure measurements
19 Moskovsky ave., St. Petersburg, 190005,
References
1. Antsukova A. I., Gorobei V. N., Pimenova A. A., Chernyshenko A. A. Ispytaniia sovremennykh vakuummetrov v tseliakh utverzhdeniia tipa za poslednie 10 let [Tests of modern vacuum gauges for type approval over the past 10 years]. Trudy 25-i Vserossiiskoi nauchno-tekhnicheskoi konferentsii s mezhdunarodnym uchastiem «Vakuumnaia tekhnika i tekhnologii – 2018» [Proceedings of the 25th All-Russian Scientific and Technical Conference with international participation «Vacuum Engineering and Technology – 2018»]. Sankt-Petersburg, 5–7 June 2018. (In Russ.).
2. Gorobei V. N., Garshin A. Ia., Kuvandykov R. E. Rezonansnyi vakuummetricheskii preobrazovatel’, sozdannyi po tekhnologii MEMS [Resonance vacuum gauge created using MEMS technology]. Trudy 24-i Vserossiiskoi nauchno-tekhnicheskoi konferentsii s mezhdunarodnym uchastiem «Vakuumnaia tekhnika i tekhnologii – 2017» [Proceedings of the 24th All-Russian Scientific and Technical Conference with international participation «Vacuum Engineering and Technology – 2017»]. Sankt-Petersburg, 6 June 2017. (In Russ.).
3. Landau L. D., Lifshits E. M. Kratkii kurs teoreticheskoi fiziki. Mekhanika [Short course of theoretical physics. Mechanics.]. Nauka Publ., Moscow, 1969. 304 p. (In Russ.).
4. Kurth S. et al. A new vacuum friction gauge based on a Si tuning fork. Sensors and Actuators A: Physical. 2002;97:167–172.
5. Avdonin A. S. Applied methods for calculating shells and thin-walled structure. Mashinostroenie Publ., Moscow, 1969. 405 p. (In Russ.).
Review
For citations:
Gorobey V.N., Kuvandykov R.E., Teteruk R.A. Resonant vacuum gauge. Measurement Standards. Reference Materials. 2020;16(1):17-23. (In Russ.) https://doi.org/10.20915/2687-0886-2020-16-1-17-23
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